One of the keys to a perfect product is the accurate measurement of its surfaces. We manufacture powerful multi-sensor metrology tools that do exactly that. Our optical profilometers determine roughness, profile, flatness, topography, sample thickness and many other surface parameters while setting new standards. The non-contact profilometers measure your samples quickly and non-destructively. Our high quality surface metrology tools are used in various sectors such as development, FA, manufacturing and quality control.
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The proven multi-sensor technology of FRT enables the combination of different technologies and measuring ranges in one optical profilometer. According to your measuring applications and needs, we combine chromatic sensors, white light interferometers, confocal microscopes, various film thickness sensors, an atomic force microscope (AFM), as well as a thermal load unit. With the MicroProf® measuring system you gain maximum you gain maximum flexibility and time savings because of the non-destructive analysis of surface structures.
The MicroProf® universal surface measuring tools are very versatile and modular measuring systems. Whether as a table-top unit or a fully automated measuring system - it can be used in R&D as well as in production. No matter whether you want to measure profiles, areas, roughness, flatness, topography, layer thicknesses or many other parameters - the MicroProf® profilometer makes it possible as a true all-rounder with sub-nanometer precision. The MicroProf® is easy to use, very robust, future-proof and delivers results fast.
Based on our multi-sensor concept, the measurement of topography, sample thickness and film thickness is available in one metrology tool. The configuration combines sensors which use various optical measurement methods. Below you will find 7 exemplary applications, which we present to you with our Metrology Capability banners: 1) roughness of a Si wafer, 2) step height and width of a quartz coil, 3) flatness of a sealing surface, 4) wafer thickness / total thickness variation (TTV) of a Si wafer, 5) thin film and layer stack measurement of a photoresist on a Si wafer, 6) hybrid metrology.
In the following video we will show you the advantages of the multi-sensor technology in a simple way. See for yourself how you can benefit from a FRT surface measuring tool.
Are you interested in our measuring tools? Do you have questions about specific applications and sensor configurations?
Talk to our experts.
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Now in it's third generation of multi-sensor surface measuring tools, the MicroProf® enables a multitude of measuring tasks to be performed quickly, efficiently and intuitively. As an established standard profilometer in modern 3D surface metrology, the MicroProf® provides high-precision metrology solutions. We are particularly specialized in the semiconductor and MEMS industries, but we are also well versed in industries such as automotive, engineering, sapphire, photovoltaic, medical, optics and packaging industries.
Are you interested in our measuring tools? Do you have questions about specific applications and sensor configurations?
Talk to our experts.
Get in contact
Paul Flynn
+1 408 261 2632
info@frtofamerica.com
1101 South Winchester Blvd, Suite L-240
San Jose, CA 95128