Our Technologies: point, line and field of view sensors, optionally atomic force microscopy

Whether you want to measure the topography, the sample thickness or the film thickness of your samples without contact, the versatile 3D surface measurement technology from FRT can be used universally due to the proven optical multi-sensor technology. Various optical measurement methods, which are only available as individual solutions elsewhere, have been combined into a universal, space-saving device.

Based on our multi-sensor concept, the 3D surface measuring devices can be equipped with point, line and field of view sensors for topography analysis as well as with film thickness sensors. In addition, atomic force microscopy can also be applied. As a result, complex measurement tasks can be solved with the use of different sensors by collecting the data from each sensor and subsequently combining the different results. The decisive step is now that the instrument, respectively the recipe used, knows the complete measuring task and fully implements it. This means not only the data collection with all necessary sensors is automated, but the software also records the different results and calculates the desired parameters.

Depending on your requirements, you get a quick overview over the entire sample, as well as high-resolution detail measurements. From the manual measurement and evaluation to the fully automatic execution of sample handling, data collection and analysis, you can determine the degree of automation by selecting the appropriate software and hardware components.

If you have any questions concerning our technologies, please contact us.

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Highlights

  • optical 3D surface metrology
  • measurement of roughness, topography, layer thickness etc.
  • multi-sensor technology
  • in-house sensor development
  • fast and accurate measurement
  • high repeatability and reproducibility
  • modular hardware configuration

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