Multi-Sensor-Technology

solves high complex measuring tasks

our MULTI-SENSOR-TECHNOLOGy

Point sensors, line sensors, field of view sensors, layer thickness sensors and atomic force microscopy

Our Technologies: point, line and field of view sensors, optionally atomic force microscopy

The FRT Multi-Sensor Technology offers you the possibility to combine different measuring principles in one single tool and thus allows maximum flexibility.

For the measurement of topography, roughness, sample thickness, layer thickness and many other surface parameters, the FRT surface measuring systems can be equipped with various sensors. FRT offers a wide range of point, area and film thickness sensors and even an Atomic Force Microscope (AFM), which are fully integrated into the tool and can be flexibly arranged and combined. The possibility of retrofitting sensors opens up further options for flexible adaptation to future measuring tasks, such as individual and exchangeable sample holders.

Highlights

  • optical 3D surface metrology
  • measurement of roughness, topography, layer thickness etc.
  • multi-sensor technology
  • in-house sensor development
  • fast and accurate measurement
  • high repeatability and reproducibility
  • modular hardware configuration

FRT also offers the right solution where multi-sensor setup cannot help: hybrid metrology. Due to the multi-sensor concept we pursue, it is possible to solve a measurement task with different sensors by carrying out one measurement for each sensor and combining the different results. Not only the measurements with all necessary sensors are done automatically, but the software also records the different measurement results and calculates the desired parameters.

If you have any questions concerning our technologies, please contact us.

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Multi-Sensor-Technology


Our CWL is a fast optical point sensor which works based on the principle of chromatic distance measurement. The CWL's non-destructive method works equally reliably on highly reflective and low-reflective surfaces. For applications where high measuring speeds are required, the SLS, as a fast optical line sensor, offers the optimum solution. Like the CWL, it works according to the principle of chromatic distance measurement. Instead of a single measuring spot, this sensor images 192 measuring spots that are equidistantly aligned along a line. The scanning of a sample is thus made possible in a fraction of the time usually required for point sensors.

The measuring principle used in the confocal microscope (CFM) is a non-contact measuring method for very fast and high-resolution 3D measurement of small structures. Thanks to the confocal measuring method which works on an area basis, meaningful results are available in a few seconds.

The white light interferometer (WLI) is an optical 3D surface sensor based on the white light interferometry method. It is characterized by fast, flat topography measurements with excellent height resolution in the sub-nanometer range.

Also optical film thickness sensors with interferometric or reflectometric methods can be used, so that the film thickness can be determined non-destructively from a few millimeters to less than one nanometer. The thin film sensor FTR can be used to measure the thickness of transparent thin films and layer stacks. The FTR thin-film sensor is based on spectrally resolved reflection measurement and sophisticated evaluation software. For materials that are opaque to visible light but transparent to infrared light, FRT makes thickness measurement possible with IRT. The IRT is an interferometric film thickness sensor with an infrared light source that has been specially developed for measuring the thickness of materials that are transparent to near infrared light.

If the high spatial resolution of the optical sensor is not sufficient, an atomic force microscope (AFM) can be integrated. The AFM allows topography measurements with sub-nm resolution. We also offer an AFM that can be mounted on your light microscope like a normal objective lens to extend the resolution and measurement capabilities of your instrument.

Were we able to convince you with our modular multi-sensor concept? Do you have questions about individual sensors or measuring principles? We are happy to answer them.

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