The FRT Multi-Sensor Technology offers you the possibility to combine different measuring principles in one single tool and thus allows maximum flexibility.
For the measurement of topography, roughness, sample thickness, layer thickness and many other surface parameters, the FRT surface measuring systems can be equipped with various sensors. FRT offers a wide range of point, area and film thickness sensors and even an Atomic Force Microscope (AFM), which are fully integrated into the tool and can be flexibly arranged and combined. The possibility of retrofitting sensors opens up further options for flexible adaptation to future measuring tasks, such as individual and exchangeable sample holders.
FRT also offers the right solution where multi-sensor setup cannot help: hybrid metrology. Due to the multi-sensor concept we pursue, it is possible to solve a measurement task with different sensors by carrying out one measurement for each sensor and combining the different results. Not only the measurements with all necessary sensors are done automatically, but the software also records the different measurement results and calculates the desired parameters.
If you have any questions concerning our technologies, please contact us.
Were we able to convince you with our modular multi-sensor concept? Do you have questions about individual sensors or measuring principles? We are happy to answer them.