Mark III - Comprehensive Metrology Evaluation Platform

The FRT Mark III analysis software is a comprehensive package for the processing, evaluation and presentation of your 2D or 3D measurements. Latest standards like roughness and waviness calculation as well as many processing and filtering functions are implemented. Choose from a wide range of options, such as roughness, flatness, step height, layer thickness and many more, to select the analysis functions suitable for your application. Present your results in 3D, as profile view or top view and design your own measurement reports. This user-friendly software also has a wide range of import and export functions and can automatically perform several processing and evaluation steps on your measurement series.

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Highlights Mark III

Analysis software for evaluation of surface and profile measurements
Evaluation of SPM data and other numerous import formats
Determination of surface parameters according to international standards and guidelines (DIN EN ISO, SEMI, etc.)
Various display options, e.g. 3D view, histogram, material fraction, autocorrelation
Analysis of particles, pores and angles
Extensive filter and modification functions
Extraction of linear and curved profiles from area measurements
Export of graphics, PDF measurement reports and other export formats
Individually designable measurement protocol layouts
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Roughness, waviness according to international standards and guidelines

Filtering and evaluation of profile and surface parameters according to DIN EN ISO 4287 and DIN EN ISO 25178
Determination of waviness according to SEP 1941
individual settings of all evaluation parameters possible