Highlights MicroProf® 200

  • stand-alone tool
  • 200 mm x 250 mm measuring range (lateral)
  • high throughput, max. measuring speed 300 mm/sec
  • the standard - several hundred systems installed worldwide
  • fully automated and integrated manufacturing device (optional)
  • individually configurable

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MicroProf® 200

As the most sought-after FRT device, the MicroProf® 200 offers contact-free and non-destructive characterisations of nearly all surfaces and layers. Its robust design and its highly reliable and long-lasting components make it suitable for non-stop deployment in every industrial environment. The customisable multi-sensor design and broad portfolio of optional extensions, the MicroProf® 200 not only solves all current metrology tasks but is prepared for all future challenges. And all this comes with intuitive and easy handling.

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TTV Option

Both, the tabletop tool and the standalone systems of the MicroProf® series include the option for two-sided sample inspection. This enables for measurement of the top and bottom side of the sample simultaneously and determination of the sample thickness. The total thickness variation (TTV) of the sample can be determined along with surface parameters, e.g. the roughness, waviness and flatness of both surfaces. The TTV option can be easily retrofitted on site.