Highlights MicroProf® TL

  • optical surface metrology at different sample temperatures
  • programmable temperature control
  • from -80° to 400°C
  • high heating and cooling rate
  • temperature stability: < 1°C
  • fully automated

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MicroProf® TL

The MicroProf® TL allows the characterisation of both the lateral and vertical deformation of samples under thermal load. In contrast to the other models of the MicroProf® series, the "TL" is equipped with our Thermal Unit - an integrated heating and cooling plate – and optionally a MicroDAC 2D deformation sensor provided by CWM. The deployment of the thermal unit allows to determine the behaviour of modules under "real conditions" or to simulate process steps under thermal load.  

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