MicroProf® TL

Highlights MicroProf® TL

  • optical surface metrology at different sample temperatures
  • programmable temperature control
  • from 10°C to 400°C
  • high heating and cooling rate
  • temperature stability: < 1°C
  • fully automated

The MicroProf® TL allows the characterisation of both the lateral and vertical deformation of samples under thermo load. In contrast to the other models of the MicroProf® series, the "TL" is equipped with our thermo unit - an integrated heating and cooling plate – and optionally a MicroDAC 2D deformation sensor provided by CWM. The deployment of the thermo unit allows to determine the behaviour of modules under "real conditions" or to simulate process steps under thermo load.  

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