MicroProf® FS

Highlights MicroProf® FS

  • multi-sensor technology and hybrid metrology for MEMS and Foundries
  • customisable for a wide range of applications within the Wafer Foundry
  • standardised and customer-specific solutions
  • greatest possible flexibility
  • handling of diverse substrate types
  • powerful software for fully-automated 2D and 3D surface metrology
  • equipment Front End Module (EFEM)


The MicroProf® FS is a fully-automated wafer metrology tool. It can be configured for a wide range of applications within the Wafer Foundry or the MEMS Fab and uses both standardised and customer-specific solutions. Its enormous versatility makes the MicroProf® FS a real "all-rounder" in the cutting-edge Foundry. That is why we call it the Foundry Star!

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The MicroProf® FS handling unit has a single-arm robot with a vacuum end effector or edge gripper, two load ports including mapper and RFID reader, pre-aligner ect.

TTV Option

Both, the tabletop tool and the standalone systems of the MicroProf® series include the option for two-sided sample inspection. This enables for measurement of the top and bottom side of the sample simultaneously and determination of the sample thickness. The total thickness variation (TTV) of the sample can be determined along with surface parameters, e.g. the roughness, waviness and flatness of both surfaces. The TTV option can be easily retrofitted on site.

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