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The standard fully automated wafer metrology tools – FE, FS, AP and DI
The standard fully automated wafer metrology tools – FE, FS, AP and DI - combine the capabilities of the worldwide established MicroProf® 300, with a wafer handling system within an Equipment Front End Module (EFEM). With fully SEMI-compliant metrology solutions and almost maintenance-free hardware components, the MicroProf® with EFEM is configurable for any front end high-volume fab (FE), for a wide range of applications in the silicon wafer foundry (FS), applications at different 3D packaging process steps (AP) or comprehensive inspection applications (DI).
The MicroProf® FS is a fully-automated wafer metrology tool. It can be configured for a wide range of applications within the Wafer Foundry or the MEMS Fab and uses both standardised and customer-specific solutions. Its enormous versatility makes the MicroProf® FS a real "all-rounder" in the cutting-edge Foundry. That is why we call it the Foundry Star!
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