Which model fits your measuring task?

Find out now...

MicroProf® SERIES

Modern optical surface metrology - fast, flexible, precise and non-contact

The MicroProf® - 3D surface measurement technology for all measurement tasks. With the third generation of multi-sensor surface measuring devices, FRT is at the forefront of the market.

The MicroProf® enables for a wide range of measurement tasks which can be carried out quickly, efficiently and intuitively. As an established standard measuring device in modern 3D surface measurement technology, the MicroProf® has impressed our customers for many years for example in the semiconductor, medical and automotive industries. They are also at home in the MEMS/NANO/MST, sapphire, photovoltaic, engineering, optics and packaging industries.

Learn more about our manual models of the MicroProf® series.

Download product brochure


  • multi-sensor technology
  • hybrid metrology
  • resolution down to sub-nm range
  • high reliability and reproducibility
  • measurement according to DIN EN ISO, SEMI and further standards
  • manual, automated or fully automated
  • upgradable - anywhere and anytime

Multi-sensor technology

Whether you want to measure the topography, the total thickness or the film thickness of your samples without contact, the versatile MicroProf® can be used universally due to the proven optical multi-sensor technology. Various optical measurement methods, which are only available as individual solutions elsewhere, have been combined into a universal, space-saving device. Depending on your requirements, the MicroProf® allows you to perform quick overview measurements of the entire sample, as well as high-resolution detail measurements down to the sub-nm range. This is made possible by the individual combinations of the sensors. Maintain flexibility for your future measurements and retrofit sensors easily and quickly, saving space, time and costs.

Now get an overview of all MicroProf® models and learn more about the individual devices and their differences.

Contact form

For more information, see privacy statement.

Fields marked with a * are mandatory and need to be filled out.