MicroProf® series

3D surface metrology - fast, flexible, accurate and contact free

The MicroProf® - 3D surface measurement technology for all measurement tasks. With the third generation of multi-sensor surface measuring devices, FRT is at the forefront of the market.

The MicroProf® enables for a wide range of measurement tasks which can be carried out quickly, efficiently and intuitively. As an established standard measuring device in modern 3D surface measurement technology, the MicroProf® has impressed our customers for many years for example in the semiconductor, medical and automotive industries. They are also at home in the MEMS/NANO/MST, sapphire, photovoltaic, engineering, optics and packaging industries.

Whether you want to measure the topography, the total thickness or the film thickness of your samples without contact, the versatile MicroProf® can be used universally due to the proven optical multi-sensor technology. Various optical measurement methods, which are only available as individual solutions elsewhere, have been combined into a universal, space-saving device. Depending on your requirements, the MicroProf® allows you to perform quick overview measurements of the entire sample, as well as high-resolution detail measurements down to the sub-nm range. This is made possible by the individual combinations of the sensors. Maintain flexibility for your future measurements and retrofit sensors easily and quickly, saving space, time and costs.

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Highlights

  • multi-sensor technology
  • hybrid metrology
  • resolution down to sub-nm range
  • high reliability and reproducibility
  • measurement according to DIN EN ISO, SEMI and further standards
  • manual, automated or fully automated
  • upgradable - anywhere and anytime