You all know such scratch-resistant coatings, whether on plastic surfaces or lenses. In addition to functional coatings, finishing layers are also becoming thinner and thinner, while the demands on quality and uniformity are increasing. This also applies to protective and insulating coatings on microelectronics.
Areas of application
Very thin transparent layers are used in medical technology, semiconductor and microsystems technology, the manufacture of flat-panel displays and OLEDs, the glass and optical industries and many others. These are usually anti-reflective coatings or scratch-resistant hard coats. The thickness of the layer and its variation over the surface are often decisive for its functionality.
Much too tiny for the human eye
Nanometers are so small that it is difficult to become aware of this "size". One nanometer behaves to one meter like the diameter of a 1 cent coin to that of the globe (Link: Hamburger Abendblatt). Impressive, isn't it?
Nowadays, in most cases layer thicknesses can be measured in the lower nanometer range. In order to select the best possible system configuration and sensor for your application, test measurements on your sample carried out by experts are recommended.
The technical solution
We at FRT offer special solutions for quality control of very thin transparent layers. The measurements can also be automatically integrated into the production process. With the combination of our optical surface measuring instruments and the FTR sensor, especially optimized for thin films, you can work effectively and determine the thickness of the films or your variation over the surface. Choose the MicroProf® with a thin film sensor FTR.
All FRT measuring tools are non-contact and non-destructive. This is particularly advantageous for sensitive layers. The MicroProf® measures according to DIN-ISO and SEMI-standards and with high traversing speed (max. 300 mm/s). It also has a large measuring range of up to 415 mm x 305 mm. If required, the tool can be retrofitted on site, e.g. to perform fully automatic wafer measurements with sample handling.
How it works
The FTR thin-film sensor is based on spectrally resolved reflection measurement and sophisticated evaluation software. The determination of the thickness of thin films with the FTR is based on the superposition of partial waves reflected at the interfaces of the thin film. The evaluation of this spectral interference pattern with FRT's own software provides information on the layer thickness of the film with nanometer resolution. The results are recorded, evaluated and finally visualized. The FTR sensor also contains an extensive database with refractive index and absorption index of a variety of semiconductors, oxides, glasses, metals, resists, etc., which can be easily supplemented by the user. Recipes can be compiled for automated measurement (point measurement, line profile or 3D mapping). The FTR sensor achieves high resolution, accuracy and repeatability in coating thickness determination.
Are you looking for further information? You can find it here!
Do you have further questions or comments? Then contact us! Our experts will be happy to help you solve your measuring tasks.
Film thickness mapping of an epitaxial layer on a SiC wafer
Reflection spectrum of a SiO2 layer on a Si wafer using a fit algorithm
Reflection spectrum of a scratch-resistant coating on a glass substrate
Film thickness mapping of a SiO2 layer on a Si wafer