09/11/2018

Part 3/5: New „Layer Mode“ for Field of View sensors

SERIES Acquire Automation XT – FRT’s Powerful Multi Sensor Software

Transparent layers impose challenges in the daily business of topography measurement. In order to get the desired result, one has to make sure that the topography data is taken from the "right" surface.

Interested in latest posts of this series? Click below.

Part 1/5: Hybrid metrology for fast and reliable determination of inaccessible parameters

Part 2/5: Software Package „Lens Shape“

Part 4/5: Software Package for Overlay Measurement

Part 5/5: Now even more features in the basic package

The new "Layer Mode", available for the CFM, CFM DT and WLI FL sensors is a giant leap forward in this difficult subject and provides the perfect solution for many different applications. The special software feature is able to distinguish between the reflections coming from the different surfaces. By the use of a graphic interface, the user is given the possibility to sort and filter the signals from the multiple surfaces and define the output of the relevant data. These settings can also be adjusted for previously measured data, i.e. a re-measurement is not required.

The "Layer Mode" can be used, e.g. to measure the topography of a poorly reflective transparent layer, while ignoring the signal from the highly reflective substrate underneath. As a further benefit, for materials with a known refractive index, the sensor can also be used to directly determine the thickness of a transparent layer.

We certainly have a solution for your specific task. Do not hesitate to contact us. Our experts will be glad to take care of your needs and work out individual solutions for you.

Interested in latest posts of this series? Click below.

Part 1/5: Hybrid metrology for fast and reliable determination of inaccessible parameters

Part 2/5: Software Package „Lens Shape“

Part 4/5: Software Package for Overlay Measurement

Part 5/5: Now even more features in the basic package