Determine high-precision flatness on large samples

Functional structures and the components on which they are applied are subject to increasingly lower manufacturing tolerances. In addition, the components are becoming larger and larger. With the MicroGlider® 600, FRT presents a multi-sensor surface measuring tool that fulfils both requirements and is equally suitable for use in R&D as well as for inspection during production.

The MicroGlider® 600 is designed to inspect large samples for their surface properties with high precision, non-contact and non-destructive. A highlight of the FRT measuring tool is the 600 x 600 mm positioning table (up to 1.5 x 1.5 m available on request). With its high-precision, non-contact drive with linear motors and sophisticated air bearings, it enables maximum measuring accuracy and significantly reduced height noise (100 nm on 600 mm travel) compared to mechanically beared axes. This makes the MicroGlider® 600 particularly suitable for fast, high-resolution flatness measurements on large surfaces, such as substrates for the semiconductor, MEMS and solar industries.

Depending on the number of measuring points, the MicroGlider® 600 determines flatness and surface data much faster and more precisely than conventional one-shot systems (e.g. interferometers). FRT offers the MicroGlider® platform with different sensors, different table sizes and powerful software. Thanks to its multifunctionality, the MicroGlider® 600 can be adapted to new tasks in just a few simple steps by adding or replacing sensors. Various optical sensors allow high-precision measurements of step height, roughness, waviness and other 2D and 3D measurement parameters. The system can be integrated into existing production processes, e.g. as a one-button solution.

The fields of application and the number of relevant industries for the MicroGlider® 600 are broad. In semiconductor and MEMS manufacturing, the system is used to investigate the flatness of large wafers. Unevenness would lead to tilting and defective structures in the lithography process (out-of-focus problem). The maximum sample weight of 50 kg of the MicroGlider® 600 allows not only the examination of light wafers but also the measurement of heavy components such as metal wafer holders, the so-called wafer chucks, and components from mechanical engineering as well as from the automotive and optical industries.

Do not hesitate to contact us if you have any questions. Our experts will be glad to help you solve your measurement tasks by creating the best possible system configuration for you.