04/28/2020

Part 1: Bearing Curve evaluation offers a clever method to classify and describe the surface texture of an object

Series: Acquire Automation XT – FRT´s Powerful Multi Sensor Software

The Bearing Curve evaluation integrated in Acquire Automation XT can be used on profile and area measurement data. It works by determining the percentage of data points at each ‘z height’, i.e. the bearing curve is drawn as %(z), where ‘z’ stands for the measured value, e.g. topography, film thickness or intensity. The percentage value is calculated by drawing a line/plane in x(y)-direction at each z value and determining the amount of data points (length or area) above the line/plane. Then the ratio, i.e. the percentage is calculated from the number of valid values above and the entire amount of valid data points. As a result of this evaluation, the graph of the bearing curve is shown as well as the outcome values for user-defined Material Ratios z(%) and Material Heights %(z).

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In the section Compose Task, the Bearing Curve evaluation can be added to a profile or area measurement by using the drag and drop function. After clicking on the evaluation, the evaluation parameters can be edited. In the data log section, the results and reports can be viewed.

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Interested in latest posts of this series? Click below.

Part 2/7: Sample Classification function offers a sophisticated way of classifying measured samples

Part 3/7: Dual Scan Mode for high-speed measurement of features with a large discontinuous step

Part 4/7: Fit based Defect Inspection find local deviations of a measurement in comparison to a reference

Part 5/7: Individual Execution of Tasks and Evaluations for Recipe Adjustment

Part 6/7: Area Alignment Task - Automatic determination and compensation of the displacement of a measurement area in relation to the die layout

Part 7/7: Access the full capability of FRT multi-sensor tools by using Hybrid Task and Hybrid Evaluation

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