Sapphire and LED

Standing in the light.

LEDs have long been omnipresent. But all light bulbs are far from being replaced. New LED and OLED technology designs are also being developed. And recognized new applications for this versatile light. We also have a lot of ground to cover in the area of substrates for these products.

The right solution for measuring tasks in the sapphire and LED industry

This is our domain - FRT measuring instruments are at home here. We offer optical surface measurement technology for various applications in the sapphire and LED sectors.

SAMPLE THICKNESS / TTV

SEMI-compliant thickness and TTV measurement

Full wafer thickness map

4 profiles of a sapphire wafer showing thickness variation

GLOBAL / LOCAL WAFER PARAMETERS

Graphical display of local wafer parameters

Full wafer thickness map in 3D view

Wafer map with local parameters (LTIR, LTV, LT, LFPD, etc.)

ROUGHNESS

DIN/ISO-compliant roughness and waviness measurement

Profile on the rough side of a sapphire wafer, Ra=0.776 µm

Profile on the polished side of a sapphire wafer, Ra=0.04 µm

TOPOGRAPHY TOP / BOTTOM

Simultaneous topography measurement on both wafer sides

Area measurement of top and bottom topography of a sapphire wafer

Profile measurement of top and bottom topography of a sapphire wafer

TOPOGRAPHY (SHAPE, STRUCTURE)

Standard topography measurement

Full wafer topography map of bottom side sapphire wafer in 3D view

Topography of a LED in 3D view

BUMPS

Bump dimensions and coplanarity

Area measurement of a wafer with PSS structures in 3D view

Profile measurement along the blue line, bump height and width analysis

STEP HEIGHT / WIDTH

Step height and width measurement

Area measurement of a sapphire wafer with gold structure in 3D view

Profile measurement along the red line, step height and width analysis

WAVINESS

DIN/ISO-compliant waviness measurement

Full topography map of a sapphire wafer in 3D

Waviness of a sapphire wafer along the red line

ROLL-OFF AMOUNT / EDGE TRIM

SEMI-compliant roll-off measurement

Roll off Amount (RoA) profile pattern

Profile on the edge of a sapphire wafer

Interested in further information about our measuring tool?

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If you have any questions or comments, please contact us directly!

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