Sapphire and LED

Standing in the light.

LEDs have long been omnipresent. But all light bulbs are far from being replaced. New LED and OLED technology designs are also being developed. And recognized new applications for this versatile light. We also have a lot of ground to cover in the area of substrates for these products.

The right solution for measuring tasks in the sapphire and LED industry

This is our domain - FRT measuring instruments are at home here. We offer optical surface measurement technology for various applications in the sapphire and LED sectors.

SAMPLE THICKNESS / TTV

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SEMI-compliant thickness and TTV measurement

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Full wafer thickness map

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4 profiles of a sapphire wafer showing thickness variation

GLOBAL / LOCAL WAFER PARAMETERS

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Graphical display of local wafer parameters

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Full wafer thickness map in 3D view

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Wafer map with local parameters (LTIR, LTV, LT, LFPD, etc.)

ROUGHNESS

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DIN/ISO-compliant roughness and waviness measurement

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Profile on the rough side of a sapphire wafer, Ra=0.776 µm

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Profile on the polished side of a sapphire wafer, Ra=0.04 µm

TOPOGRAPHY TOP / BOTTOM

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Simultaneous topography measurement on both wafer sides

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Area measurement of top and bottom topography of a sapphire wafer

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Profile measurement of top and bottom topography of a sapphire wafer

TOPOGRAPHY (SHAPE, STRUCTURE)

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Standard topography measurement

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Full wafer topography map of bottom side sapphire wafer in 3D view

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Topography of a LED in 3D view

BUMPS

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Bump dimensions and coplanarity

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Area measurement of a wafer with PSS structures in 3D view

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Profile measurement along the blue line, bump height and width analysis

STEP HEIGHT / WIDTH

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Step height and width measurement

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Area measurement of a sapphire wafer with gold structure in 3D view

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Profile measurement along the red line, step height and width analysis

WAVINESS

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DIN/ISO-compliant waviness measurement

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Full topography map of a sapphire wafer in 3D

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Waviness of a sapphire wafer along the red line

ROLL-OFF AMOUNT / EDGE TRIM

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SEMI-compliant roll-off measurement

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Roll off Amount (RoA) profile pattern

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Profile on the edge of a sapphire wafer

Interested in further information about our measuring tool? 

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